Page 1 industrial ph meter hp200 instruction manual code. Horiba d51 instruction manual pdf download manualslib. Horibastec gpz104rfe mass flow controller mfc valve he. New stec secz714agx mass flow controller devicenet mfc. Liquid source vaporization control systems 04 lfflvf series model flow range gmin rohs compliance measurement range application liquid1 all liquids except those corrosive to stainless steel ex, hcl and hf repeatability less than 3sec t98 response speed 5 to 50c accuracy guaranteed 15 to 45c 0. For both digitalanalog and devicenet communications. If you dont see the model you want please contact us. Pressure insensitive mass flow controller the secz700x series is equipped with reliable thermal sensors and a pressure insensitive function for stable flow rate control. If you need manuals, software, or assistance with equipment rented or purchased from equipco and have not found what you need, please call 18882345678.
They control the pressure relative to the external control signal that they receive. Coastal instruments services a wide range of horiba mass flow controller models. Search in horiba stec catalogs and technical brochures on directindustry and. Horiba stec, a company that has consistently introduced highquality, highly functional products to the demanding semiconductor manufacturing market. The onboard pressure measurement reduces the cost, size and complexity of gas delivery systems. Horiba stec secz3m mass flow controller n2 sccm for. Other accessories, manuals, cables, calibration data, software, etc. Do you need a lift gate truck for your drop off location crt glass, except for glass with lead content less than 5 parts per million, and clean of phosphor, crt fines, coatings and frit. Stechoriba coastal instruments mass flow controller. Horiba stec has built an enviable reputation in markets throughout the world by delivering products with superior performance specifications and excellent reliability. Lvf series liquid flow controller specification horiba.
Consult horiba stecs entire vaporizers catalogue on directindustry. These controllers have a maximum operating pressure of 300kpa g and can use the following gases. Secz500mgx horiba stec technical documentation brochure. Digital mass flow controller secn102 secn104 secn106 digitalanalog model device net model profibus model dc24v drive, current or voltage control modeldc24v drive, current or voltage control model highspeed response 1 second response at any setpoint flexible mutigas,multirange high accuracy 1. Horiba hp200 instruction manual pdf download manualslib. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid mass flow controller crosstalk phenomenon caused by pressure fluctuations. Horiba stec has consistently pursued the advance of digital mass flow controllers through the development of new functions and the improvement of. Horiba z700 coastal instruments mass flow controller. As the flowrate ratio between the sensor and the bypass is less variable, this mfc became wellregarded especially for its. Horiba z700 secz714agx mass flow controller si2h6 300 sccm amat 019041105 mfc used.
Since then, digital mass flow controllers have come to be regarded as highend products. Secz700s us8851105 secz300 series, secz500 series, secn100 series, sec z700 series, gr300 series us90888 mfc series us9304030 mfc series us9328826 dz100. The software has a number of features including mrmg base unit selection, mfc programming and a handy n2 gas conversion feature for flow rate measurements using n2 gas during flow checks. Horiba stec succeeded in developing the worlds first massproduced digital mass flow controller in 1990. Horiba has a diverse range of products to cater for your fluid measurement and control requirements. Horibastec mfc z500 secz514mgx digital mass flow device ebay. Horiba secz719mgx stec flow controller pneumativalv.
Please read the operation manual before using this product to ensure. Horiba stec d519mg pressure based mass flow controller. Stechoriba z700 coastal instruments mass flow controller. Package contents the following items are shipped with each horiba ph meter package.
Digital mass flow controller secz500x series horiba. Horiba stec incorporated horiba technology center 3265 scott boulevard santa clara, ca 95054 u. To ensure that the software is used correctly, horiba stec offers software. Horiba stec mfc mass flow controller z500 secz512mgx n2.
The stec horiba z700 is one of the products we service. Lff series liquid flow meter specification model flow range gmin measurement range application liquid1 viscosity2 accuracy3 linearity repeatability response operating temperature5 temperature coefficiency operating pressure6 pressure resistance pressure drop7 flow rate signal power supply leak integrity wetted material standard fitting 5 to 100% f. Digital mass flow controller offer multigas, multirange functionality via horibastecs configuration software. C max 1% temperature coefficiency operating pressure5 max.
Aug 24, 2012 coastal instruments services most of stec horiba mass flow controller models. The secn100 series of mass flow controllers from horiba stec is designed for use in a wide range of applications ranging from the controlled delivery of process gases for solar. In addition, horiba developed a new circuit for 4pole conductivity measurement, which was an innovation that improved the precision with any 4pole sensors. The mass flow controller, is a key piece of semiconductor manufacturing equipment. Concentration of singlecomponent such as hydrofluoric acid or tmah are measured based on precise electrical conductivity and temperature measurements. Horiba stec secz312m mass flow controller 0sccm n2 for. Coastal instruments, your mass flow controller specialists for the last 33 years, is proud to announce our capability to service the horiba stec z300 series devices. Horiba stec, a company that has consistently introduced highquality, highly functional products to the demanding semiconductor manufacturing market, and thereby grown its worldwide market share to over 30%1, has recently developed a new mass flow controller, one that breaks the mold completely and will change the future of mass flow control. The high performance auto pressure regulator urz700 series has electronic regulators with highprecision pressure sensors and high resolution, fast response piezo actuator valves. Horiba stec secz719mgx n2 sccm mass flow controller. If you need manuals, software, or assistance with equipment rented or purchased from equipco and have not.
This includes the z300, z310, z312, and z314 models. Horiba secz724agx mass flow controller n2 30000 sccm for. The secz700x series demonstrates high stability and controls the gas flow without effecting the. Pressure insensitive a new highperformance function provides a simplified gas supply systems. Stec fluid control high performance mass flow controller.
C4f8 100sccm for sale 3 new horiba mass flow controller mfc gas. Consult horiba stecs entire secz500mgx catalogue on directindustry. This mass flow controller is in good condition with a few scuffs and scratches from normal use, but nothing major or anything that would affect function. In a variety of manufacturing processes and research laboratories we offer precise measurement and reliable control of gas and liquids. Horiba stec z500 model secz5mgx 300sccm n2 mass flow controller mfc. Jan 27, 2017 us8056579 mfc series us7881829 mfc series us8763928 mv series us8744784 d200, d500 us8019481 mfc series us7802482 sec z700 series us8376312 d200, d500, d800 us8265795 sec z700 us8356623 sec z700 us8851105 mfc series us90888 mfc series us9304030 sec z700 series us9223318 gdcone us8844901 secz500, sec z700 series us8429979 vg200 us8661919. The horiba stec sec4400 series mass flow controllers have a response speed of less than 1 second and a repeatability of 0. Concentration of singlecomponent such as hydrofluoric acid or tmah are measured based on.
Secz700x series exhibit high stability and control the gas flow without effect of upstream and downstream pressure fluctuations. Valve opening and closing signal to mass flow controller. New stec secz714agx mass flow controller devicenet mfc o2. High performance mass flow controller mhz electronics. Please read the operation manual before using this product. Horiba stec sec4400mc mass flow controller price, specs. Download manuals and software for horiba models d21, d22, d24, ocma350, u10, u50 series, ocma550, and ocma550. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. Horiba stec secz312m mass flow controller 0sccm n2. Pressure insensitive mass flow controller multi gas multi range function variable pid function gives high speed response within 1 second across the whole. Its quality and efficiency play a major role in the success or failure of the semiconductor manufacturing process. Flow setting signal, and flow output signal common. Horiba stec, a company that has consistently introduced highquality, highly functional products. C 2 f 6, c 3 f 8, c 4 f 8, sf 6, sif 4, etcthese controllers featuure an autoclose function.
1541 1399 482 333 1415 1666 172 1395 725 1661 1706 947 1718 1493 1713 793 1821 925 534 113 1066 1265 466 1617